Extorr XT200M Quadrupole Residual Gas Analyzer RGA consisting of Ion Gauge + Pirani Gauge with Electron Multiplier & More, for Vacuum System
Extorr XT200M Quadrupole Residual Gas Analyzer + Ion Gauge + Pirani Gauge with Electron Multiplier, USB to Serial Converter, Power Adapter and RS232 Cable
1 to 200 amu
Resolution:
Greater than 1 amu @ 10% peak height, adjustable
Operating pressure
Atmosphere to UHV ( ion gauge operation below 10-2 torr, RGA operation below 10-3 torr and Multiplier operation below 10-6 torr)
Partial Pressure Detector type
Faraday cup
Partial Pressure Sensitivity (A/Torr)
5x10-4 into Faraday cup. Measured with N2 @ 28 amu with 1 amu full peak width, 10% height, 70 eV electron energy, 6 eV ion energy and 2 mA electron emission current.
Minimum detectable partial pressure
5x10-14 torr with Multiplier. Measured with N2 @ 28 amu with 1 amu full peak width, 10% height, 70 eV electron energy, 6 eV ion energy, and 2 mA electron emission current. 10-11 torr with Faraday cup.
Total Pressure Detector type >10-3 Torr
Pirani type, (measures heat loss from noble metal wire)
Total Pressure Detector type <10-3 Torr
Bayard/Alpert type ion gauge, x-ray limit 10-9
CCU Max. operating temperature
70°C
CCU temperature sensor
solid state sensor in CCU, temperature continuously monitored and displayed
Bakeout temperature
350°C (without CCU)
Probe operating temperature
100°C, Platinum RTD on probe, temperature continuously monitored and displayed
Ionizer Design
Open ion source , electron impact ionization.
Probe Materials
SS304, Kovar, Tungsten, Alumina, Iridium, Copper, Nickel
Filament
Dual Thoriated Iridium with firmware protection.
Degas
Built-in 1 to 30 W ramp-upBuilt-in 1 to 30 W ramp-upBuilt-in 1 to 30 W ramp-up
Electron energy
10 to 150 V, continuously programmable
Ion energy
3 to 10 V, continuously programmable
Electron emission current
0.1 to 5 mA, continuously programmable
Probe mounting
Minimum tube I.D. 1.375" flange 2.75" CF
CCU dimensions
3.3" x 4.8"x 7.5". Easily separated from the probe for bakeout
Mass stability
±0.1 amu after 30 minutes warmup.
Power requirement
24 VDC @ 2.1 Amps. Standard
Weight: 5lbs
* Includes Power Adapter and RS232 cable